Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9679798 | Substrate conveyance apparatus and substrate peeling system | Osamu Hirakawa, Yasutaka SOMA, Takeshi Tamura, Kazutaka Noda, Xavier Francois Brun +1 more | 2017-06-13 |
| 9595462 | Peeling system | Takeshi Tamura, Akira Fukutomi, Masaaki Umitsuki | 2017-03-14 |