Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9552990 | Storage and sub-atmospheric delivery of dopant compositions for carbon ion implantation | Ashwini K. Sinha, Douglas C. Heiderman, Lloyd Anthony Brown, Serge M. Campeau, Robert Shih +2 more | 2017-01-24 |