Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829152 | Cylinder preparation for maintaining stability of stored materials | Ronald F. Spohn, Carl B. Richenberg | 2017-11-28 |
| 9816642 | Method and apparatus for controlling gas flow from cylinders | Zachary Fowler, Stephan Gamard, Paul K. Oetinger, Murat Gunay, Lloyd Anthony Brown +1 more | 2017-11-14 |
| 9627180 | Method for ion source component cleaning | Serge M. Campeau, Lloyd Anthony Brown | 2017-04-18 |
| 9570271 | Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation | Stanley M. Smith, Douglas C. Heiderman, Serge M. Campeau | 2017-02-14 |
| 9552990 | Storage and sub-atmospheric delivery of dopant compositions for carbon ion implantation | Douglas C. Heiderman, Lloyd Anthony Brown, Serge M. Campeau, Robert Shih, Dragon Lu +2 more | 2017-01-24 |
| 9548181 | Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation | Stanley M. Smith, Douglas C. Heiderman, Serge M. Campeau | 2017-01-17 |