Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627180 | Method for ion source component cleaning | Ashwini K. Sinha, Lloyd Anthony Brown | 2017-04-18 |
| 9570271 | Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation | Ashwini K. Sinha, Stanley M. Smith, Douglas C. Heiderman | 2017-02-14 |
| 9552990 | Storage and sub-atmospheric delivery of dopant compositions for carbon ion implantation | Ashwini K. Sinha, Douglas C. Heiderman, Lloyd Anthony Brown, Robert Shih, Dragon Lu +2 more | 2017-01-24 |
| 9548181 | Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation | Ashwini K. Sinha, Stanley M. Smith, Douglas C. Heiderman | 2017-01-17 |