Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9816642 | Method and apparatus for controlling gas flow from cylinders | Zachary Fowler, Stephan Gamard, Paul K. Oetinger, Murat Gunay, Laurie O'Connor +1 more | 2017-11-14 |
| 9627180 | Method for ion source component cleaning | Ashwini K. Sinha, Serge M. Campeau | 2017-04-18 |
| 9552990 | Storage and sub-atmospheric delivery of dopant compositions for carbon ion implantation | Ashwini K. Sinha, Douglas C. Heiderman, Serge M. Campeau, Robert Shih, Dragon Lu +2 more | 2017-01-24 |