Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685362 | Apparatus and method for centering substrates on a chuck | Shawn A. Adderly, Samantha D. DiStefano, Jeffrey P. Gambino, Max G. Levy, Max L. Lifson +1 more | 2017-06-20 |
| 9576863 | Method of fine-tuning process controls during integrated circuit chip manufacturing based on substrate backside roughness | Shawn A. Adderly, Kyle Babinski, Daniel A. Delibac, David A. DeMuynck, Shawn R. Goddard +2 more | 2017-02-21 |