Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9685362 | Apparatus and method for centering substrates on a chuck | Shawn A. Adderly, Jeffrey P. Gambino, Max G. Levy, Max L. Lifson, Matthew D. Moon +1 more | 2017-06-20 |
| 9543219 | Void monitoring device for measurement of wafer temperature variations | Shawn A. Adderly, Mark Esposito, Jeffrey P. Gambino, Prakash Periasamy | 2017-01-10 |