Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543219 | Void monitoring device for measurement of wafer temperature variations | Shawn A. Adderly, Samantha D. DiStefano, Jeffrey P. Gambino, Prakash Periasamy | 2017-01-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543219 | Void monitoring device for measurement of wafer temperature variations | Shawn A. Adderly, Samantha D. DiStefano, Jeffrey P. Gambino, Prakash Periasamy | 2017-01-10 |