Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9559051 | Method for manufacturing in a semiconductor device a low resistance via without a bottom liner | Yongchun Xin, Junjing Bao, Zhigang Song, Yunsheng Song | 2017-01-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9559051 | Method for manufacturing in a semiconductor device a low resistance via without a bottom liner | Yongchun Xin, Junjing Bao, Zhigang Song, Yunsheng Song | 2017-01-31 |