Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9796001 | Apparatus and method for removing particles present on a wafer using photoelectrons and an electric field | Si-Hyun Kim | 2017-10-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9796001 | Apparatus and method for removing particles present on a wafer using photoelectrons and an electric field | Si-Hyun Kim | 2017-10-24 |