Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852881 | Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope | Chie Shishido, Takuma Yamamoto, Shinya Yamada | 2017-12-26 |
| 9824853 | Electron microscope device and imaging method using same | Mitsutoshi KOBAYASHI, Kenji Nakahira | 2017-11-21 |
| 9741530 | Charged-particle-beam device, specimen-image acquisition method, and program recording medium | Yusuke Ominami, Kenji Nakahira, Shinsuke Kawanishi | 2017-08-22 |
| 9671223 | Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time | Chie Shishido, Katsuhiro Sasada | 2017-06-06 |