Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852881 | Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope | Takuma Yamamoto, Shinya Yamada, Maki Tanaka | 2017-12-26 |
| 9671223 | Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time | Maki Tanaka, Katsuhiro Sasada | 2017-06-06 |