Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9759666 | Defect detection method and defect detection device and defect observation device provided with same | Yuko Otani, Takehiro Tachizaki, Masahiro Watanabe | 2017-09-12 |
| 9568437 | Inspection device | Akira Hamamatsu, Takahiro Jingu | 2017-02-14 |
| 9535013 | Method and apparatus for inspecting defect | Taketo Ueno, Atsushi Taniguchi | 2017-01-03 |