Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9768058 | Methods of forming air gaps in metallization layers on integrated circuit products | Zhiguo Sun, Christian Witt | 2017-09-19 |
| 9741610 | Sacrificial amorphous silicon hard mask for BEOL | Zhiguo Sun, Jiehui Shu | 2017-08-22 |
| 9711447 | Self-aligned lithographic patterning with variable spacings | Jiehui Shu, Daniel W. Fisher, Haigou Huang, Jinping Liu, Haifeng Sheng +1 more | 2017-07-18 |
| 9595493 | Reducing liner corrosion during metallization of semiconductor devices | Zhiguo Sun, Huang Liu, Haigou Huang, Jiehui Shu, Jin Ping Liu | 2017-03-14 |