Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9734988 | Exposure apparatus and exposure method | Akio Yamada, Masaki Kurokawa, Masahiro Seyama | 2017-08-15 |
| 9684245 | Exposure apparatus | Akio Yamada | 2017-06-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9734988 | Exposure apparatus and exposure method | Akio Yamada, Masaki Kurokawa, Masahiro Seyama | 2017-08-15 |
| 9684245 | Exposure apparatus | Akio Yamada | 2017-06-20 |