Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824860 | Charged particle beam exposure apparatus and method of manufacturing semiconductor device | — | 2017-11-21 |
| 9799489 | Exposure apparatus | Shinichi Hamaguchi, Hitoshi Tanaka, Atsushi Tokuno, Shinichi Kojima | 2017-10-24 |
| 9792528 | Information processing system, information processing method, information processing apparatus and control method and control program thereof, and communication terminal and control method and control program thereof | Toshiyuki Nomura, Kota Iwamoto, Ryota Mase | 2017-10-17 |
| 9754169 | Information processing system, information processing method, information processing device and control method and control program thereof, and communication terminal and control method and control program thereof | Toshiyuki Nomura, Kota Iwamoto, Ryota Mase | 2017-09-05 |
| 9734988 | Exposure apparatus and exposure method | Shinji Sugatani, Masaki Kurokawa, Masahiro Seyama | 2017-08-15 |
| 9684245 | Exposure apparatus | Shinji Sugatani | 2017-06-20 |
| 9607807 | Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same | Tatsuro Okawa, Masahiro Seyama, Masaki Kurokawa | 2017-03-28 |
| 9561708 | Roll-screen device | Shinya Yukisada | 2017-02-07 |