Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9734988 | Exposure apparatus and exposure method | Akio Yamada, Shinji Sugatani, Masahiro Seyama | 2017-08-15 |
| 9607807 | Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same | Akio Yamada, Tatsuro Okawa, Masahiro Seyama | 2017-03-28 |
| 9569651 | Controller for optical information reader | Mitsuaki Hirono, Naoya Niizeki, Jun Higa | 2017-02-14 |