Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9734988 | Exposure apparatus and exposure method | Akio Yamada, Shinji Sugatani, Masaki Kurokawa | 2017-08-15 |
| 9607807 | Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same | Akio Yamada, Tatsuro Okawa, Masaki Kurokawa | 2017-03-28 |