Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9692325 | High conductivity electrostatic chuck | David E. Suuronen, Lyudmila Stone, Julian G. Blake, Dale K. Stone, Richard A. Cooke +1 more | 2017-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9692325 | High conductivity electrostatic chuck | David E. Suuronen, Lyudmila Stone, Julian G. Blake, Dale K. Stone, Richard A. Cooke +1 more | 2017-06-27 |