Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791784 | Assembly for a projection exposure apparatus for EUV projection lithography | Michael Patra, Markus Deguenther, Johannes Wangler | 2017-10-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791784 | Assembly for a projection exposure apparatus for EUV projection lithography | Michael Patra, Markus Deguenther, Johannes Wangler | 2017-10-17 |