Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9752057 | CMP method for suppression of titanium nitride and titanium/titanium nitride removal | Hui-Fang Hou, Ming-Chih Yeh, Chih-Pin Tsai | 2017-09-05 |
| 9633863 | Compositions and methods for selective polishing of silicon nitride materials | — | 2017-04-25 |
| 9617450 | Polishing composition and method utilizing abrasive particles treated with an aminosilane | Steven Grumbine, Shoutian Li, Pankaj Kumar Singh, Jeffrey Dysard | 2017-04-11 |
| 9566686 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, Glenn Whitener | 2017-02-14 |
| 9548211 | Method to selectively polish silicon carbide films | Timothy Johns | 2017-01-17 |