Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803106 | Methods for fabricating a chemical-mechanical polishing composition | Steven Grumbine, Ernest Shen, Mary Cavanaugh, Daniel Clingerman | 2017-10-31 |
| 9617450 | Polishing composition and method utilizing abrasive particles treated with an aminosilane | Steven Grumbine, Shoutian Li, William Ward, Pankaj Kumar Singh | 2017-04-11 |
| 9566686 | Composition for tungsten CMP | Steven Grumbine, Lin Fu, William Ward, Glenn Whitener | 2017-02-14 |
| 9567491 | Tungsten chemical-mechanical polishing composition | Lin Fu, Steven Grumbine, Tina Li | 2017-02-14 |
| 9556363 | Copper barrier chemical-mechanical polishing composition | Lin Fu, Steven Grumbine, Wei Weng, Lei Liu, Alexei P. Leonov | 2017-01-31 |