Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824851 | Charge drain coating for electron-optical MEMS | William M. Tong, Alan D. Brodie, Anil U. Mane | 2017-11-21 |
| 9786511 | Sequential infiltration synthesis for advanced lithography | Seth B. Darling, Yu-Chih Tseng, Qing Peng | 2017-10-10 |
| 9727672 | Fast method for reactor and feature scale coupling in ALD and CVD | Angel Yanguas-Gil | 2017-08-08 |
| 9684234 | Sequential infiltration synthesis for enhancing multiple-patterning lithography | Seth B. Darling, Yu-Chih Tseng | 2017-06-20 |
| 9598769 | Method and system for continuous atomic layer deposition | Angel Yanguas-Gil, Joseph A. Libera | 2017-03-21 |