Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9727672 | Fast method for reactor and feature scale coupling in ALD and CVD | Jeffrey W. Elam | 2017-08-08 |
| 9598769 | Method and system for continuous atomic layer deposition | Jeffrey W. Elam, Joseph A. Libera | 2017-03-21 |