Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786511 | Sequential infiltration synthesis for advanced lithography | Seth B. Darling, Jeffrey W. Elam, Yu-Chih Tseng | 2017-10-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9786511 | Sequential infiltration synthesis for advanced lithography | Seth B. Darling, Jeffrey W. Elam, Yu-Chih Tseng | 2017-10-10 |