Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9796882 | CMP processing composition comprising alkylamine and cyclodextrin | Alexander W. Hains | 2017-10-24 |
| 9771496 | Tungsten-processing slurry with cationic surfactant and cyclodextrin | Kevin P. Dockery, Helin Huang, Lin Fu | 2017-09-26 |
| 9567491 | Tungsten chemical-mechanical polishing composition | Lin Fu, Steven Grumbine, Jeffrey Dysard | 2017-02-14 |