MY

Ming-Chih Yeh

CM Cabot Microelectronics: 2 patents #12 of 57Top 25%
Overall (2017): #121,346 of 506,227Top 25%
2
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9803109 CMP composition for silicon nitride removal Hung-Tsung HUANG, Chih-Pin Tsai 2017-10-31
9752057 CMP method for suppression of titanium nitride and titanium/titanium nitride removal Hui-Fang Hou, William Ward, Chih-Pin Tsai 2017-09-05