Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9803109 | CMP composition for silicon nitride removal | Hung-Tsung HUANG, Chih-Pin Tsai | 2017-10-31 |
| 9752057 | CMP method for suppression of titanium nitride and titanium/titanium nitride removal | Hui-Fang Hou, William Ward, Chih-Pin Tsai | 2017-09-05 |