Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9828674 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2017-11-28 |
| 9783563 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2017-10-10 |
| 9765431 | Atomic layer deposition of metal phosphates and lithium silicates | Jani Hamalainen, Jani Holopainen, Timo Hatanpää, Mikko Ritala | 2017-09-19 |
| 9677173 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Mikko Ritala, Suvi Haukka | 2017-06-13 |
| 9646820 | Methods for forming conductive titanium oxide thin films | Viljami Pore, Mikko Ritala | 2017-05-09 |