Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9677173 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2017-06-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9677173 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2017-06-13 |