Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502234 | Methods to prepare silicon-containing films | Manchao Xiao, Bing Han, Mark Leonard O'Neill | 2016-11-22 |
| 9460912 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2016-10-04 |
| 9447287 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Ronald Martin Pearlstein, Haripin Chandra, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2016-09-20 |
| 9435027 | Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel | Charles Michael Birtcher, Thomas Andrew Steidl | 2016-09-06 |
| 9337018 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Daniel P. Spence, Haripin Chandra, Bing Han, Mark Leonard O'Neill +2 more | 2016-05-10 |
| 9243324 | Methods of forming non-oxygen containing silicon-based films | Heather Regina Bowen, Jianheng Li, Mark Leonard O'Neill, Manchao Xiao, Andrew David Johnson | 2016-01-26 |
| 9233990 | Organoaminosilanes and methods for making same | Manchao Xiao, Matthew R. MacDonald, Richard Ho | 2016-01-12 |