Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460912 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2016-10-04 |