Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460912 | High temperature atomic layer deposition of silicon oxide thin films | Meiliang Wang, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Mark Leonard O'Neill +1 more | 2016-10-04 |
| 9447287 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2016-09-20 |
| 9337018 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Bing Han, Mark Leonard O'Neill +2 more | 2016-05-10 |