Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502234 | Methods to prepare silicon-containing films | Manchao Xiao, Xinjian Lei, Bing Han | 2016-11-22 |
| 9460912 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein +1 more | 2016-10-04 |
| 9447287 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Ronald Martin Pearlstein, Haripin Chandra, Eugene Joseph Karwacki, Jr. +1 more | 2016-09-20 |
| 9337018 | Methods for depositing films with organoaminodisilane precursors | Manchao Xiao, Xinjian Lei, Daniel P. Spence, Haripin Chandra, Bing Han +2 more | 2016-05-10 |
| 9293361 | Materials and methods of forming controlled void | Raymond Nicholas Vrtis, Dingjun Wu, Mark Daniel Bitner, Jean Louise Vincent, Eugene Joseph Karwacki, Jr. +1 more | 2016-03-22 |
| 9243324 | Methods of forming non-oxygen containing silicon-based films | Heather Regina Bowen, Jianheng Li, Manchao Xiao, Andrew David Johnson, Xinjian Lei | 2016-01-26 |