Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520272 | Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus | Taro Ikeda, Hiroyuki Miyashita, Yutaka Fujino, Tomohito Komatsu | 2016-12-13 |
| 9520273 | Tuner, microwave plasma source and impedance matching method | Hiroyuki Miyashita | 2016-12-13 |
| 9281154 | Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus | Taro Ikeda, Shigeru Kasai, Hiroyuki Miyashita | 2016-03-08 |