Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520272 | Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus | Hiroyuki Miyashita, Yuki Osada, Yutaka Fujino, Tomohito Komatsu | 2016-12-13 |
| 9281154 | Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus | Yuki Osada, Shigeru Kasai, Hiroyuki Miyashita | 2016-03-08 |