Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520272 | Microwave emission mechanism, microwave plasma source and surface wave plasma processing apparatus | Taro Ikeda, Hiroyuki Miyashita, Yuki Osada, Yutaka Fujino | 2016-12-13 |