Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362149 | Etching method, etching apparatus, and storage medium | Yusuke Muraki, Tomohiro Suzuki | 2016-06-07 |
| 9281154 | Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus | Taro Ikeda, Yuki Osada, Hiroyuki Miyashita | 2016-03-08 |