Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443724 | Modification processing method and method of manufacturing semiconductor device | Tamotsu Morimoto, Kazuaki Nishimura | 2016-09-13 |
| 9362149 | Etching method, etching apparatus, and storage medium | Shigeru Kasai, Tomohiro Suzuki | 2016-06-07 |