Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9358588 | Substrate cleaning method, substrate cleaning system and program storage medium | Tsukasa Watanabe, Naoki Shindo, Takahiro Furukawa | 2016-06-07 |
| 9305818 | Substrate processing apparatus | Takafumi Tsuchiya, Koji Egashira | 2016-04-05 |
| 9236280 | Substrate processing apparatus, substrate processing method, and storage medium | Takayuki Toshima, Mitsuaki Iwashita, Mikio Nakashima | 2016-01-12 |