Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9358588 | Substrate cleaning method, substrate cleaning system and program storage medium | Naoki Shindo, Takahiro Furukawa, Yuji Kamikawa | 2016-06-07 |
| 9354085 | Angle detecting device with complex self-calibration function | — | 2016-05-31 |