Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9421569 | Plating apparatus, plating method and storage medium | Takashi Tanaka, Yusuke Saito, Mitsuaki Iwashita | 2016-08-23 |
| 9236280 | Substrate processing apparatus, substrate processing method, and storage medium | Mitsuaki Iwashita, Yuji Kamikawa, Mikio Nakashima | 2016-01-12 |