Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523153 | Pre-treatment method for plating and storage medium | Takashi Tanaka, Yuichiro Inatomi, Kazutoshi Iwai | 2016-12-20 |
| 9505019 | Plating apparatus, plating method and storage medium | Yuichiro Inatomi, Takashi Tanaka | 2016-11-29 |
| 9487865 | Plating apparatus, plating method and storage medium | Yuichiro Inatomi, Takashi Tanaka | 2016-11-08 |
| 9421569 | Plating apparatus, plating method and storage medium | Takashi Tanaka, Yusuke Saito, Takayuki Toshima | 2016-08-23 |
| 9255331 | Apparatus for plating process | Takashi Tanaka, Yusuke Saito | 2016-02-09 |
| 9236280 | Substrate processing apparatus, substrate processing method, and storage medium | Takayuki Toshima, Yuji Kamikawa, Mikio Nakashima | 2016-01-12 |