Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324600 | Mounting table structure and plasma film forming apparatus | Shiro Hayashi, Hiroyuki Yokohara | 2016-04-26 |
| 9253862 | Plasma processing method and plasma processing apparatus | Tatsuo Hirasawa, Osamu Yokoyama, Chiaki Yasumuro, Ryota Yoshida, Takashi Sakuma +1 more | 2016-02-02 |