Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343295 | Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium | Ikuo Sawada, Sumie Nagaseki, Kyoko Ikeda | 2016-05-17 |
| 9252001 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Kazuyoshi Matsuzaki, Songyun Kang | 2016-02-02 |