Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343295 | Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium | Ikuo Sawada, Kyoko Ikeda, Tatsuro Ohshita | 2016-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9343295 | Vaporizing unit, film forming apparatus, film forming method, computer program and storage medium | Ikuo Sawada, Kyoko Ikeda, Tatsuro Ohshita | 2016-05-17 |