Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9441292 | Etching method, etching apparatus, and ring member | Ayuta Suzuki, Tsuyoshi Moriya, Nobutoshi TERASAWA, Yoshiaki Okabe | 2016-09-13 |
| 9252001 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Tatsuro Ohshita, Kazuyoshi Matsuzaki | 2016-02-02 |