Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252001 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Tatsuro Ohshita, Songyun Kang | 2016-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252001 | Plasma processing apparatus, plasma processing method and storage medium | Ikuo Sawada, Peter Ventzek, Tatsuro Ohshita, Songyun Kang | 2016-02-02 |