KK

Kazuo Kibi

TL Tokyo Electron Limited: 1 patents #252 of 758Top 35%
Overall (2016): #335,927 of 481,213Top 70%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9490105 Plasma processing apparatus and method Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more 2016-11-08