Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508582 | Parallel single substrate marangoni module | Daniel Goodman, David G. Guarnaccia | 2016-11-29 |
| 9453290 | Apparatus for fluid processing a workpiece | John Harrell, Zhenqiu Liu, Qunwei Wu | 2016-09-27 |
| 9449862 | Parallel single substrate processing system | Freeman Fisher, Daniel Goodman | 2016-09-20 |
| 9421617 | Substrate holder | Daniel Goodman, David G. Guarnaccia | 2016-08-23 |
| 9303329 | Electrochemical deposition apparatus with remote catholyte fluid management | David G. Guarnaccia, Demetrius Papapanayiotou, Jonathan Hander | 2016-04-05 |
| 9293356 | Parallel single substrate processing system | Freeman Fisher, Daniel Goodman, Jonathan Haynes | 2016-03-22 |
| 9257319 | Parallel single substrate processing system with alignment features on a process section frame | — | 2016-02-09 |