AK

Artur Kolics

Lam Research: 7 patents #10 of 356Top 3%
Overall (2016): #15,459 of 481,213Top 4%
7
Patents 2016

Issued Patents 2016

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
9490211 Copper interconnect Lie Zhao 2016-11-08
9476018 Wafer cleaning formulation 2016-10-25
9406556 Method of making an interconnect device 2016-08-02
9382627 Methods and materials for anchoring gapfill metals 2016-07-05
9368340 Metallization of the wafer edge for optimized electroplating performance on resistive substrates 2016-06-14
9353444 Two-step deposition with improved selectivity Praveen Nalla, Seshasayee Varadarajan 2016-05-31
9287183 Using electroless deposition as a metrology tool to highlight contamination, residue, and incomplete via etch Larry Zhao, Praveen Nalla 2016-03-15